High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs

James L. Maxwell; Mats Boman; Kirk Williams; Kajsa Larsson; N. Jaikumar; G. Saiprasanna

doi:10.1117/12.361225

30 August 1999 High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs

James L. Maxwell, Mats Boman, Kirk Williams, Kajsa Larsson, N. Jaikumar, G. Saiprasanna

Author Affiliations +

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361225
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

This paper reports advances in high-pressure, 3D laser chemical vapor deposition, which may be used to prototype insulating and metallic high-aspect-ratio microstructures. In this case, carbon was grown from ethylene at pressures of 1-11 bar; fine free-standing fibers of diamond-like carbon were grown at linear rates exceeding 120,000 microns per second. This record-setting growth rate allows the computer- controlled prototyping of centimeter-scale structures in only 15-20 minutes. The volumetric growth rate is scalable in pressure and laser power so that, with a single tool, micron-size details may be deposited as readily as large objects. The morphology, diameter, and steady-state growth rate of the carbon fibers were mapped versus the input laser power, the pre-cursor pressure, and the gas flow rate. Using a rotating mandrel, helical, tapered, and folded coils were grown at rates of 10-25 micrometers /s. Flat carbon coils were also grown by steadily increasing the radius of the laser focus from the mandrel while maintaining a constant tangential velocity. Tungsten fibers and single crystals were also grown from WF₆ and H₂ gas mixtures.

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James L. Maxwell, Mats Boman, Kirk Williams, Kajsa Larsson, N. Jaikumar, and G. Saiprasanna "High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361225

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