New dimensions of micromachining with 157-nm laser light

Michael Kauf; Heinrich Endert; John H. Fair; Rainer Paetzel; Michael J. Scaggs; Dirk Basting

doi:10.1117/12.360464

3 September 1999 New dimensions of micromachining with 157-nm laser light

Michael Kauf, Heinrich Endert, John H. Fair, Rainer Paetzel, Michael J. Scaggs, Dirk Basting

Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360464
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Fluorine (F₂) lasers emit at 157 nm, the shortest commercially available laser wavelength. Innovations such as NovaTube^TM technology have resulted in powerful, highly reliable and cost effective F₂ lasers. This paper will discuss the most recent F₂ laser developments, resulting in repetition rates up to 1000 Hz and pulse energies in excess of 25 mJ. The industry now considers F₂ lasers to be the next step (after ArF at 193 nm) in key technologies such as lithography and micromachining.

Citation Download Citation

Michael Kauf, Heinrich Endert, John H. Fair, Rainer Paetzel, Michael J. Scaggs, and Dirk Basting "New dimensions of micromachining with 157-nm laser light", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); https://doi.org/10.1117/12.360464

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available