Magnetically driven surface-micromachined mirrors for optical applications

Gwo-Bin Lee; Thomas Tsao

doi:10.1117/12.361252

2 September 1999 Magnetically driven surface-micromachined mirrors for optical applications

Gwo-Bin Lee, Thomas Tsao

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361252
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

A surface-micromachined plate-type actuator with two torsional support beams has been developed for optical applications. A silicon-nitride plate with an area of 1 X 1 mm² is electroplated with a soft magnetic material (permalloy) and can be activated by an external magnetic field. In order to deflect the mirror to a very large angle, the geometry of the beams has been optimized using numerical simulation and theoretical analysis. Experimental data showed that the micro mirror is robust enough to be rotated up to 180 degrees over 10,000 times without any damage. The mirror is demonstrated as a laser beam deflector in this study. The deflection angle of the mirror can be controlled by the rotation of a permanent magnet. Data showed that this mirror could be rotated up to 90 degrees with a maximum frequency of 20 Hz. Details including design, fabrication, analysis, as well as operation, have been presented. Results showed that the device could be used as a scanning mirror for future application.

Citation Download Citation

Gwo-Bin Lee and Thomas Tsao "Magnetically driven surface-micromachined mirrors for optical applications", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361252

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