Developing a low-cost accelerometer for implantable pacemakers

Lary R. Larson; David Ruben; Mark Henschel; Sarah A. Audet

doi:10.1117/12.359373

18 August 1999 Developing a low-cost accelerometer for implantable pacemakers

Lary R. Larson, David Ruben, Mark Henschel, Sarah A. Audet

Proceedings Volume 3880, MEMS Reliability for Critical and Space Applications; (1999) https://doi.org/10.1117/12.359373
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

The M beam device described herein is a surface mount accelerometer. This device is built from commonly available piezo material using a novel packaging approach that resolves many of the issues that make competing accelerometers expensive. The concept includes separating the piezo material into active and inactive areas by sawing the piezo material into an M shape. The two outer legs are used for package connection (inactive area) and the inner leg is free to move as a piezoelectric beam (active area). The design equations for M beam characteristics are presented.

Citation Download Citation

Lary R. Larson, David Ruben, Mark Henschel, and Sarah A. Audet "Developing a low-cost accelerometer for implantable pacemakers", Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); https://doi.org/10.1117/12.359373

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