Novel micropump actuated by thin film shape memory alloy

Dong Xu; Bingchu Cai; Guifu Ding; Yong Zhou; Aibin Yu; Li Wang; Xiaolin Zhao

doi:10.1117/12.364466

29 September 1999 Novel micropump actuated by thin film shape memory alloy

Dong Xu, Bingchu Cai, Guifu Ding, Yong Zhou, Aibin Yu, Li Wang, Xiaolin Zhao

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364466
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

A novel micropump actuated by thin film shape memory alloy has been designed, fabricated and tested. It is one of the membrane reciprocating micropumps which is driven by shape recoverable force of NiTi thin film and biasing force of Si membrane. The micropump is composed of a deformable chamber and two Si flap check valves. The structure of pump is simple. The pump was manufactured by Si surface and bulk micromachining technologies, Au-Si eutectic and epoxy bonding. The outer dimension of the micropump is 6*6*1.5 mm/mm/mm. The NiTi/Si composite actuator has an area of 3*3mm/mm with a thickness of 20micrometers Testing result show that the pump has extremely good performance, such as high pumping yield, low power consumption high working frequency. All these advantages are attributed to the patterning of NiTi thin film used as self-heating element and optimizing design of NiTi/Si actuated structure.

Citation Download Citation

Dong Xu, Bingchu Cai, Guifu Ding, Yong Zhou, Aibin Yu, Li Wang, and Xiaolin Zhao "Novel micropump actuated by thin film shape memory alloy", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364466

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