Photosensitive sol-gel waveguides on silicon substrates as MOEM devices

Ananth Selvarajan; A. Anil Kumar; D. Prem Anil kumar; Gopalkrishna M. Hegde; Talabuttala Srinivas

doi:10.1117/12.388922

21 June 2000 Photosensitive sol-gel waveguides on silicon substrates as MOEM devices

Ananth Selvarajan, A. Anil Kumar, D. Prem Anil kumar, Gopalkrishna M. Hegde, Talabuttala Srinivas

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388922
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

Integrated optical components formed by sol-gel process and MEMS devices created on silicon substrate can be used to realize different types of sensing elements for smart structure applications. In this paper we report the fabrication of Ce, Ge and (Ce + Er) doped sol-gel based waveguides on silicon substrates and their optical characterization in terms of light amplification and photosensitivity. We also report results of fabrication and characterization of Bragg gratings in sol-gel based waveguides. The number of layers required for waveguidance and single mode operation has been calculated using the dispersion equations for asymmetric planar waveguides.

Citation Download Citation

Ananth Selvarajan, A. Anil Kumar, D. Prem Anil kumar, Gopalkrishna M. Hegde, and Talabuttala Srinivas "Photosensitive sol-gel waveguides on silicon substrates as MOEM devices", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388922

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