Experimental and theoretical study of dual-crossed-beam pulsed laser deposition

Michel L. Autric; Laetitia Lambert; Tatiana Itina

doi:10.1117/12.378164

25 February 2000 Experimental and theoretical study of dual-crossed-beam pulsed laser deposition

Michel L. Autric, Laetitia Lambert, Tatiana Itina

Proceedings Volume 4070, ALT '99 International Conference on Advanced Laser Technologies; (2000) https://doi.org/10.1117/12.378164
Event: ALT'99 International Conference: Advanced Laser Technologies, 1999, Potenza-Lecce, Italy

Abstract

Pulsed laser ablation appears as a promising technique for depositing thin films. A large variety of successful experimental results were obtained in this field, including the growth of high-temperature superconducting films, ferroelectric films, oxides, semiconductors, diamonds, etc. One of the main advantages of this technology is the relative simplicity of the experimental set-up and the possibility to get good homogeneity, complex stoichiometry materials and well adhesive dense layers. The main drawback seems to be the production of macroparticles, their transfer to the growing film inducing inhomogeneity and roughness onto the surface, lowering the properties of the thin films. In a common configuration, the laser-generated flux is collected on a planar substrate positioned parallel to the irradiated surface. In order to improve the stoichiometry and the quality of the films, several modifications, like simultaneous generation of two plumes from different targets with different targets with different laser beams, were proposed. In this paper, we present some results concerning the production of cryolite thin films using the conventional pulsed laser deposition technique and the dual crossed beams pulsed laser deposition technique. Plasma plumes expanding in vacuum and interacting together are visualized. The different species ejected in the plumes are detected through narrow-band filters in order to determine their kinetic energies. The morphology and the composition of the films are compared with the thermal evaporation technique.

Citation Download Citation

Michel L. Autric, Laetitia Lambert, and Tatiana Itina "Experimental and theoretical study of dual-crossed-beam pulsed laser deposition", Proc. SPIE 4070, ALT '99 International Conference on Advanced Laser Technologies, (25 February 2000); https://doi.org/10.1117/12.378164

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