Paper
25 February 2000 Laser surface cleaning and real-time monitoring
Yongfeng Lu, Wen Dong Song, H. M. Hong, Yuan Wei Zheng
Author Affiliations +
Proceedings Volume 4070, ALT '99 International Conference on Advanced Laser Technologies; (2000) https://doi.org/10.1117/12.378176
Event: ALT'99 International Conference: Advanced Laser Technologies, 1999, Potenza-Lecce, Italy
Abstract
Laser cleaning has emerged as an effective cleaning technique for removing contaminants from solid surfaces. Dry laser cleaning and steam laser cleaning have been developed recently, relying on pulsed laser heating of the heating of the surface without and with the presence of a thin liquid coating. Two cleaning models for the viewpoint of force and energy for dry laser cleaning and a cleaning model for steam laser cleaning were established for removal of particles from solid surfaces by taking Van der Waals force, capillary force and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. Laser- induced removal of film-type contaminants has been studied and the surface cleanliness has been studied and the surface cleanliness can be monitored in real time by acoustic and electric means.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongfeng Lu, Wen Dong Song, H. M. Hong, and Yuan Wei Zheng "Laser surface cleaning and real-time monitoring", Proc. SPIE 4070, ALT '99 International Conference on Advanced Laser Technologies, (25 February 2000); https://doi.org/10.1117/12.378176
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Cited by 2 scholarly publications.
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KEYWORDS
Particles

Solids

Contamination

Pulsed laser operation

Acoustics

Excimer lasers

Liquids

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