Paper
11 July 2000 ZnSe/Si growth by liquid phase deposition
Min Yen Yeh, Hung Ming Yen
Author Affiliations +
Abstract
ZnSe is an important semiconductor material with a large bandgap (2.68 eV), which has the potential to be used for photoluminescent and eletroluminescent devices and for window layer of solar cells. In this work, a low-cost and large-area growth method for ZnSe layer on Si substrate was studied by liquid phase deposition (LPD). The micrograph of the surface shows specula but a roughness surface texture is obtained. The island texture could be improved by raising growth temperatures. The crystallinity could be improved by the growth temperature considerations. High resistivity and specular layers were obtained as grown at room temperature. The abrupt interface resulted from less interdiffusion between ZnSe layers and substrates was reasonable under the growth condition at room temperatures.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Min Yen Yeh and Hung Ming Yen "ZnSe/Si growth by liquid phase deposition", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392183
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KEYWORDS
Silicon

Liquids

Interfaces

Thin films

Crystals

Laser phosphor displays

X-ray diffraction

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