Paper
30 November 1983 Techniques For Fabricating High Index Overlay Films On LiNbO3
S. Forouhar, C. Warren, R.-X. Lu, W. S. C. Chang
Author Affiliations +
Proceedings Volume 0408, Integrated Optics III; (1983) https://doi.org/10.1117/12.935699
Event: 1983 Technical Symposium East, 1983, Arlington, United States
Abstract
We report here three different techniques for making high-refractive-index transparent films on LiNbO3 in the form of either planar or two-dimensional structures. Such techniques should be very useful for making a number of integrated optical components on LiNbO3.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Forouhar, C. Warren, R.-X. Lu, and W. S. C. Chang "Techniques For Fabricating High Index Overlay Films On LiNbO3", Proc. SPIE 0408, Integrated Optics III, (30 November 1983); https://doi.org/10.1117/12.935699
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Cited by 3 scholarly publications.
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KEYWORDS
Waveguides

Titanium dioxide

Oxidation

Fabrication

Overlay metrology

Oxygen

Refractive index

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