Epitaxial growth and characterization of oxide thin films

Guozhen Yang; Huibin Lu; T. Zhao; Fan Chen; Zhenghao Chen

doi:10.1117/12.408479

29 November 2000 Epitaxial growth and characterization of oxide thin films

Guozhen Yang, Huibin Lu, T. Zhao, Fan Chen, Zhenghao Chen

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408479
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

More than ten kinds of oxide thin films and their heterostructure have been successfully fabricated on SrTiO₃ (001) substrates by laser molecular beam epitaxy. Measurements of atomic force microscopy, high-resolution transmission electron microscope and x-ray small-angle reflectivity reveal that the surfaces and interfaces are atom-level-smooth. The unit cell layers and the lattice structure are perfect. The enhancement of second-harmonic generation in BaTiO₃/SrTiO₃ (BTO/STO) superlattices and the thickness dependent structural characteristics of BaTiO₃ (BTO) thin films were observed.

Citation Download Citation

Guozhen Yang, Huibin Lu, T. Zhao, Fan Chen, and Zhenghao Chen "Epitaxial growth and characterization of oxide thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408479

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