Influence of top electrode of PZT capacitor on ferroelectric properties

Pingsun Qiu; Aili Ding; Xiyun He; Weigen Luo

doi:10.1117/12.408356

29 November 2000 Influence of top electrode of PZT capacitor on ferroelectric properties

Pingsun Qiu, Aili Ding, Xiyun He, Weigen Luo

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408356
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

PZT thin films were prepared by a modified sol-gel technique. Au was used as a top electrode of PZT capacitor. An influence of the process of the top electrode on the PZT ferroelectric capacitor was investigated. The relationship between remnant polarization, coercive electric field and the conditions of thermal treatment for the top Au electrode was discussed. The diffusion of Au and the interface between PZT and Au were analyzed by Auger spectra too. The proper heat treatment condition for optimal ferroelectric performance in the PZT capacitor was suggested.

Citation Download Citation

Pingsun Qiu, Aili Ding, Xiyun He, and Weigen Luo "Influence of top electrode of PZT capacitor on ferroelectric properties", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408356

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