Positioning strategies and sensor integration in tools for assembling MOEMS

Gunther Reinhart; Dirk Jacob

doi:10.1117/12.396513

22 August 2000 Positioning strategies and sensor integration in tools for assembling MOEMS

Gunther Reinhart, Dirk Jacob

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396513
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Assembly is a crucial process during the production of microsystems. Especially automated and economic assembly of flip- chip at small and medium batch sizes is not solved at the moment in industry. For flexible and economic assembly of standard and flip-chip elements a tool was developed, which makes it possible to assemble MOEMS with an accuracy of less than 8 micrometers by a standard industrial robot. This is done by integrating a fine positioning drive and sensors into the tool. Moreover, a special optics module for the assembly of flip-chip elements was developed, which can be used in different positioning devices in a manual and automatic modus.

Citation Download Citation

Gunther Reinhart and Dirk Jacob "Positioning strategies and sensor integration in tools for assembling MOEMS", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396513

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