New advance in laser interferometry

Chunyong Yin; Zhixia Chao; Sai Gao; Hong Jiang; Jin Sun

doi:10.1117/12.402620

9 October 2000 New advance in laser interferometry

Chunyong Yin, Zhixia Chao, Sai Gao, Hong Jiang, Jin Sun

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402620
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

Modern technology development requires interferometry of uttermost quality, which is characterized as high measurement speed, large measurement range, low drift and super-high resolution, good accuracy and efficiency. Firstly this paper introduces a frequency stabilized laser with 5MHz beat frequency which is based on the bi-reflection principle, and a high measurement speed dual-frequency laser interferometer whose allowable displacement velocity is over 1m/s using this kind of laser. Secondly it introduces a transverse Zeeman frequency stabilized laser with 300KHz beat frequency and its applications in nanometer measurement, collimation, coaxiality measurement, roll angle measurement and biomembrane measurement. Thirdly a tunable 633nm external-cavity diode laser (ECL) interferometer is presented.

Citation Download Citation

Chunyong Yin, Zhixia Chao, Sai Gao, Hong Jiang, and Jin Sun "New advance in laser interferometry", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402620

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