Succinct design method of soft x-ray multilayer mirror

Li-Min Song; Jia-sheng Hu

doi:10.1117/12.401778

5 October 2000 Succinct design method of soft x-ray multilayer mirror

Li-Min Song, Jia-sheng Hu

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401778
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In order to acquire high reflectance, how to select the thickness d_H and d_L of the high and low atomic numbers materials should be considered first of all in the design of soft x-ray multi-layer. This paper introduced a simple design method based on matrix method. In the design process of a multi-layer mirror using Mo/Si at (lambda) equals 13.1 nm and normal incidence, its reflectance reaches 67.0 percent when layers are 30. Compared with other method, although its reflectance is a bit lower, it is a simple and practical method.

Citation Download Citation

Li-Min Song and Jia-sheng Hu "Succinct design method of soft x-ray multilayer mirror", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401778

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