Microsensor for noncontact temperature measurement

Xiaoping Li; W. F. Chan

doi:10.1117/12.404916

20 October 2000 Microsensor for noncontact temperature measurement

Xiaoping Li, W. F. Chan

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404916
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Micro temperature sensors are needed for non-contact measurement of temperatures of micro devices and components. The miniaturization of existing temperature sensors for non- contact temperature measurement are limited by their sensing methods which sense the temperatures by measuring the radiation energy. In this study, a micro sensor for non- contact surface temperature measurement is designed using a new approach in which the temperature is determined by measuring the blackbody radiation wavelength corresponding to the surface temperature, based on Plank's law for blackbody thermal radiation and Wien's theorem for the relationship between wavelength of radiation and the corresponding blackbody temperature. The radiation wavelength is determined through measuring the electrical field of the radiation waves, based on the theory of electromagnetic field of blackbody radiation. The micro temperature sensor designed using this approach comprises a group of probes in micrometer or nanometer scales for collecting electrical signals from the electric field of blackbody radiation and a data processing circuit for signal amplification as well as for determining the surface temperature according to the measured radiation wavelength. In this way, the sensor requires no calibration. The measurable range of temperatures is determined by the size of the probes, and the precision of the measurement is determined by the precision of the probes.

Citation Download Citation

Xiaoping Li and W. F. Chan "Microsensor for noncontact temperature measurement", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404916

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available