Fabrication of binary optical elements by thin film deposition

Wei Huang; Chongxi Zhou; Jin Zhu; Yundong Zhang

doi:10.1117/12.402784

6 October 2000 Fabrication of binary optical elements by thin film deposition

Wei Huang, Chongxi Zhou, Jin Zhu, Yundong Zhang

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402784
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

In this paper, the process of fabrication of binary optical elements by thin film deposition has been introduced. An eight-level phase microlens array has been fabricated with 20 X 20 rectangularly shaped microlenses, focal length of 100 mm and lens size of 0.8 mm for the wavelength of 0.6328 μm. Our measurements show that all the step heights are nearly identical and the controlled precision of step heights was better than 1 nm.

Citation Download Citation

Wei Huang, Chongxi Zhou, Jin Zhu, and Yundong Zhang "Fabrication of binary optical elements by thin film deposition", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402784

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