Combinatorial approach for ferroelectric thin film using solution-based process

Hiroshi Funakubo; Gan He; Takashi Iijima

doi:10.1117/12.424748

23 April 2001 Combinatorial approach for ferroelectric thin film using solution-based process

Hiroshi Funakubo, Gan He, Takashi Iijima

Proceedings Volume 4281, Combinatorial and Composition Spread Techniques in Materials and Device Development II; (2001) https://doi.org/10.1117/12.424748
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

Possibility of combinatorial approach to discover a new composition with novel property is discussed mainly focused on the ferroelectric materials. Sol-gel based process has an advantage of easy change of composition to discover a new material with good ferroelectricity and piezoelectric property. Pb(Zr,Ti)O3 with different Zr/(Zr+Ti) composition was successfully prepared by using two methods. One is the mixing at solution state from Pb-Ti and Pb-Zr solutions. The other is the mixing by making Pb-Ti (PT) and Pb-Zr (PZ) solid state layers and the following heat treatment. Mixing at solution state is useful to get a film with a good quality in a shorter time. As a result, sol-gel based process is ascertained to be very effective because of its possibility of making large number of pixels with different composition in a shorter time.

Citation Download Citation

Hiroshi Funakubo, Gan He, and Takashi Iijima "Combinatorial approach for ferroelectric thin film using solution-based process", Proc. SPIE 4281, Combinatorial and Composition Spread Techniques in Materials and Device Development II, (23 April 2001); https://doi.org/10.1117/12.424748

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available