Paper
16 July 2001 Development of force-feedback-controlled Nafion micromanipulators
Wenli Zhou, Wen Jung Li, Ning Xi, Shugen Ma
Author Affiliations +
Abstract
The ability to manipulation of biological cells while having reflective-force information from the cells is a key technology necessary for many new applications in Bio-MEMS, but is currently lacking in all cellular manipulators. We will report on our preliminary experimental work in using an Ionic Conducting Polymer Film (ICPF) to develop a biological cell robotic gripper with force sensing capability. ICPF actuators are able to give large deflection with small input voltage (~5V), and also able to give relatively large output voltage due to deflection by a mechanical forces, thus are investigated as a possible material to make force-feedback controlled cellular manipulators in our work. A laser micromachining process is introduced to fabricate arrays of ICPF griping devices, which can be potentially integrated onto a substrate to develop a micro manipulation system. Individual multi-finger grippers with dimensions of 200micrometers x 200micrometers x 3000micrometers for each finger were realized. We will report on the design, fabrication procedures, and operating performance of these micro-grippers. Further development in the reduction of size of these actuators will enable effective force-feedback control of underwater micro objects and lead to new frontiers in cellular manipulation.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenli Zhou, Wen Jung Li, Ning Xi, and Shugen Ma "Development of force-feedback-controlled Nafion micromanipulators", Proc. SPIE 4329, Smart Structures and Materials 2001: Electroactive Polymer Actuators and Devices, (16 July 2001); https://doi.org/10.1117/12.432672
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Cited by 8 scholarly publications.
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KEYWORDS
Actuators

Polymers

Gas lasers

Gold

Metals

Laser cutting

Sensors

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