Laser-induced damage of fluoride coatings for UV lasers

K. Yoshida; M. Ohya; K. Yagi; Toshimasa Matsuoka; Kanyoshi Ochi; M. Sunagawa; Tomosumi Kamimura

doi:10.1117/12.425066

12 April 2001 Laser-induced damage of fluoride coatings for UV lasers

K. Yoshida, M. Ohya, K. Yagi, Toshimasa Matsuoka, Kanyoshi Ochi, M. Sunagawa, Tomosumi Kamimura

Proceedings Volume 4347, Laser-Induced Damage in Optical Materials: 2000; (2001) https://doi.org/10.1117/12.425066
Event: Laser-Induced Damage in Optical Materials: 2000, 2000, Boulder, CO, United States

Abstract

UV and DUV lasers are very important for many applications such as micro-machining, new material creation, medical care, and photo-lithography. Laser-induced damage of thin films coated on optical components used for UV and DUV lasers are serious problem. We have developed a new technique for producing anti- reflection (AR) coating on various substrate materials including fused silica glass and CaF₂ crystal. In this technique, porous magnesium fluoride (MgF₂) AR coating was developed. The reflectance of the porous AR coating on fused silica substrate was 0.3% at 500 nm.

Citation Download Citation

K. Yoshida, M. Ohya, K. Yagi, Toshimasa Matsuoka, Kanyoshi Ochi, M. Sunagawa, and Tomosumi Kamimura "Laser-induced damage of fluoride coatings for UV lasers", Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); https://doi.org/10.1117/12.425066

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