Design and test of new high-Q microresonators fabricated by UV-LIGA

Skandar Basrour; H. Majjad; Jean-Rene Coudevylle; Michel de Labachelerie

doi:10.1117/12.425337

5 April 2001 Design and test of new high-Q microresonators fabricated by UV-LIGA

Skandar Basrour, H. Majjad, Jean-Rene Coudevylle, Michel de Labachelerie

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425337
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench set-up and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.

Citation Download Citation

Skandar Basrour, H. Majjad, Jean-Rene Coudevylle, and Michel de Labachelerie "Design and test of new high-Q microresonators fabricated by UV-LIGA", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425337

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