Integrating optical wave simulation into microsystems CAD tools

Bassam Saadany; Diaa Abdel-Maguid M. Khalil

doi:10.1117/12.425350

5 April 2001 Integrating optical wave simulation into microsystems CAD tools

Bassam Saadany, Diaa Abdel-Maguid M. Khalil

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425350
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

A method for integrating optical wave propagation into electrical simulators is presented. For this purpose the Beam Propagation Method has been implemented using the HDL-A^TM language. This enables the simulation of optical wave propagation on the system level, using current Microsystems CAD tools. Some typical optical components have been simulated using this technique and satisfactory results were obtained. This enables the analysis of MOEMS components into standard Microsystems CAD tools using electrical simulators.

Citation Download Citation

Bassam Saadany and Diaa Abdel-Maguid M. Khalil "Integrating optical wave simulation into microsystems CAD tools", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425350

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