MEMSMaster: a new approach to prototype MEMS

David Moulinier; Philippe Metsu; Marie-Pierre Brutails; Stephane Bergeon; Philippe Nachtergaele

doi:10.1117/12.425365

5 April 2001 MEMSMaster: a new approach to prototype MEMS

David Moulinier, Philippe Metsu, Marie-Pierre Brutails, Stephane Bergeon, Philippe Nachtergaele

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425365
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

MEMS design environments are often FEM analysis centric. This relationship has kept MEMS design in a relative niche situation understood by experts. MEMSMaster implements a new design methodology for MEMS prototyping, based on a predefined set of parameterized elements composing dedicated libraries. It should ease access to MEMS technology to a wider audience.

Citation Download Citation

David Moulinier, Philippe Metsu, Marie-Pierre Brutails, Stephane Bergeon, and Philippe Nachtergaele "MEMSMaster: a new approach to prototype MEMS", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425365

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