Sensitivity of surface acoustic wave devices

Jerzy Filipiak; Konrad Zubko

doi:10.1117/12.435855

10 August 2001 Sensitivity of surface acoustic wave devices

Jerzy Filipiak, Konrad Zubko

Proceedings Volume 4412, International Conference on Solid State Crystals 2000: Growth, Characterization, and Applications of Single Crystals; (2001) https://doi.org/10.1117/12.435855
Event: International Conference on Solid State Crystals 2000, 2000, Zakopane, Poland

Abstract

The SAW devices are widely used as filters, delay lines, resonators and gas sensors. It is possible to use it as mechanical force. The paper describes sensitivity of acceleration sensor based on SAW using the Rayleigh wave propagation. Since characteristic of acceleration SAW sensors are largely determined by piezoelectric materials, it is very important to select substrate with required characteristics. Researches and numerical modeling based on simply sensor model include piezoelectric beam with unilateral free end. An aggregated mass is connected to the one. The dimension and aggregated mass are various. In this case a buckling stress and sensitivity are changed. Sensitivity in main and perpendicular axis are compare for three sensor based on SiO₂, LiNbO₃, Li₂B₄O₇. Influences of phase velocity, electro-mechanical coupling constant and density on sensitivity are investigated. Some mechanical parameters of the substrates in dynamic work mode are researched using sensor model and Rayleigh model of vibrations without vibration damping. The model is useful because it simply determines dependencies between sensor parameters and substrate parameters. Differences between measured and evaluated quantities are less than 5 percent. Researches based on sensor modes, which fulfilled mechanical specifications similarly to aircraft navigation.

Citation Download Citation

Jerzy Filipiak and Konrad Zubko "Sensitivity of surface acoustic wave devices", Proc. SPIE 4412, International Conference on Solid State Crystals 2000: Growth, Characterization, and Applications of Single Crystals, (10 August 2001); https://doi.org/10.1117/12.435855

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KEYWORDS

Sensors

Acoustics

Quartz

Crystals

Applied physics

Gas sensors

Numerical modeling

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