Nanometric accuracy repositioning contract probe-mount for periodic surface artifacts calibration

Baij Nath Gupta; Lakhan Singh Tanwar

doi:10.1117/12.427071

8 May 2001 Nanometric accuracy repositioning contract probe-mount for periodic surface artifacts calibration

Baij Nath Gupta, Lakhan Singh Tanwar

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427071
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

A contact probe mount with few nanometer repositioning capability for laser interferometric calibration of step- gauges and length bars has been attempted. Design is based on the autocollimetric capabilities of 0.01 sec. of arc capabilities to work out the deviation of the inductive probe which has to be moved up and downward for the positioning of the different facets of the gauge under calibration. A provisional mount has been arranged to study the repeatability and reproducibility of the design of the probe mount. The probe deviations thus observed can be used as correction factors or in improving the mount design to desired level of few nanometer accuracy. The methodology and the experimental setup used for the study is discussed in detail. A repeatability figure of 5 nm obtained with a manual mount conforms the design of the probe mount.

Citation Download Citation

Baij Nath Gupta and Lakhan Singh Tanwar "Nanometric accuracy repositioning contract probe-mount for periodic surface artifacts calibration", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427071

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available