Morphological characterization of various kinds of materials in femtosecond laser micromachining

Kosuke Kawahara; Yasunobu Kurogi; Naoyuki Matsuo; Hiroshi Sawada; Atsushi Yokotani; Kou Kurosawa

doi:10.1117/12.456876

25 February 2002 Morphological characterization of various kinds of materials in femtosecond laser micromachining

Kosuke Kawahara, Yasunobu Kurogi, Naoyuki Matsuo, Hiroshi Sawada, Atsushi Yokotani, Kou Kurosawa

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456876
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

We are developing applications of femtosecond-laser ablation to the practical material processing such as cutting, drilling, dicing and turning. In this work, we have observed the morphology of ablation traces formed on the surfaces of various materials to investigate the influence of physical properties of work materials on the machining preciseness. Ti:sapphire laser pulses ((lambda) equals 790 nm, (tau) equals 160fs, f equals 10 Hz, E equals 0.6 ~ 1.2 mJ/pulse) were focused on the samples, insulators (silica glass and PMMA), semiconductor (Si), and metals (Cu and Al), fixed on a PC- controlled X-Y stage and moved one-dimensionally at a scan rate of 5.5 ~111 micrometers /sec. Grooves with well-defined edge were observed on the insulators which have low thermal conductivity. In the case of the metallic materials having relatively high thermal conductivity, molten walls were observed near the edge of the grooves. It is considered that mainly thermal conductivity plays an important role in characteristics of the ablation morphology.

Citation Download Citation

Kosuke Kawahara, Yasunobu Kurogi, Naoyuki Matsuo, Hiroshi Sawada, Atsushi Yokotani, and Kou Kurosawa "Morphological characterization of various kinds of materials in femtosecond laser micromachining", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456876

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