mu-BGA (ball grid array) singulation with a pulsed Nd:YAG laser

Kwang-Yeol Baek; Cheon Lee

doi:10.1117/12.456854

25 February 2002 μ-BGA (ball grid array) singulation with a pulsed Nd:YAG laser

Kwang-Yeol Baek, Cheon Lee

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456854
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

In a microelectronics industry, the (mu) -BGA singulation system has been studied by mechanical type. However, this has burr and device damage by mechanical stress. So we need to research other systems to solve many problems. There are only a few types of lasers - excimer, CO₂, Nd:YAG, copper vapor lasers in use for polymers and metals. In this paper, we have studied minimization of the line-width and surface burning which occur after the singulation process with a pulsed Nd:YAG((lambda) equals532 nm, repetition rate equals10 Hz) laser. The thermal energy of a pulsed Nd:YAG laser is used to cut the copper layer. Especially, the sacrifice layer and N₂ blowing are effective in minimizing surface burning. The N₂ blowing reduces a laser energy loss by debris and suppresses a surface oxidation. The SEM (scanning electron microscopes), non- contact 3D inspector and high-resolution microscope are used to measure cutting line-width and surface state. The (mu) - BGA threshold energy is 234.1 kJ/cm₂ at 50micrometers /s scan speed.

Citation Download Citation

Kwang-Yeol Baek and Cheon Lee "μ-BGA (ball grid array) singulation with a pulsed Nd:YAG laser", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456854

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