Paper
29 June 2001 New model concering the hollow cathode electric discharge (HCED) as a spectral source in mixed noble gases and metal vapors
Iancu Iova, M. Bazavan, Costel Biloiu, Gheorghe Ilie, Ioana Biloiu
Author Affiliations +
Proceedings Volume 4430, ROMOPTO 2000: Sixth Conference on Optics; (2001) https://doi.org/10.1117/12.432812
Event: ROMOPTO 2000: Sixth Conference on Optics, 2000, Bucharest, Romania
Abstract
This work concerns with the excitation and ionization processes in the cathode region of the hollow cathode abnormal glow discharge, like in a genetically abnormal glow discharge in mixture of noble gases and metal vapors. The proposed model takes into account the ionic and atomic population of metal vapors, the metastables population of predominant buffer gas and of the ion population of the gas mixture, while the other models, reported in the literature don't take into account the last two populations. This model is qualitatively experimentally attested.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Iancu Iova, M. Bazavan, Costel Biloiu, Gheorghe Ilie, and Ioana Biloiu "New model concering the hollow cathode electric discharge (HCED) as a spectral source in mixed noble gases and metal vapors", Proc. SPIE 4430, ROMOPTO 2000: Sixth Conference on Optics, (29 June 2001); https://doi.org/10.1117/12.432812
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KEYWORDS
Metals

Chemical species

Ions

Copper

Ionization

Krypton

Sputter deposition

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