Use of light scatter signals to identify particle material

John C. Stover; Vladimir I. Ivakhnenko; Yuri A. Eremin

doi:10.1117/12.450086

10 December 2001 Use of light scatter signals to identify particle material

John C. Stover, Vladimir I. Ivakhnenko, Yuri A. Eremin

Proceedings Volume 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II; (2001) https://doi.org/10.1117/12.450086
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Defect detection and counting have been used to qualify silicon wafers for use in device production for several years. Defect sizing is attempted by comparing scatter signals, used for detection, to signals produced from spherical polystyrene latex spheres of known diameter. Real particles are neither spherical nor made of plastic, and scatter differently. This paper addresses the issue of spherical particle material identification through the measurement of scatter signals into several directions. The basic idea is that the average diameter and material constants comprising the complex index amount to three unknowns. The question is whether they can be estimated from three independent measurements. The results presented here are quite positive. The issue of particle shape is left for another paper.

Citation Download Citation

John C. Stover, Vladimir I. Ivakhnenko, and Yuri A. Eremin "Use of light scatter signals to identify particle material", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450086

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available