Systems engineering for planar-integrated free-space optics

Stefan Sinzinger

doi:10.1117/12.450447

13 December 2001 Systems engineering for planar-integrated free-space optics

Stefan Sinzinger

Proceedings Volume 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing; (2001) https://doi.org/10.1117/12.450447
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Planar optics is a promising approach to the integration of free-space optical systems. From a systems perspective we discuss the processing steps and tools necessary for the engineering and fabrication of planar optical systems. These contain layout and simulation of the integrated free-space optical systems, generation of lithographic masks, and systems fabrication. We present integrated planar-optical systems for applications in optical interconnects, optical security and signal processing systems, as well as optical sensors.

Citation Download Citation

Stefan Sinzinger "Systems engineering for planar-integrated free-space optics", Proc. SPIE 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing, (13 December 2001); https://doi.org/10.1117/12.450447

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