Experiment and simulation study of instability of a novel electrostatic MEMS relay

Cong-Shun Wang; Weibin Zhang; Chunyang Xiong; Jing Fang

doi:10.1117/12.468762

29 May 2002 Experiment and simulation study of instability of a novel electrostatic MEMS relay

Cong-Shun Wang, Weibin Zhang, Chunyang Xiong, Jing Fang

Proceedings Volume 4537, Third International Conference on Experimental Mechanics; (2002) https://doi.org/10.1117/12.468762
Event: Third International Conference on Experimental Mechanics, 2002, Beijing, China

Abstract

In this paper, the mechanical-electronic behavior of a bulk- micromachined relay driven by electrostatic actuator for lateral movement, is experimentally studied and simulated. Due to the small size, the deformation measurement of the MEMS relay is very difficult on a macroscopic scale. The digital image correlation technology was employed to determine the dimensions and displacements of the moving relay. Based on the video films and the collapse deformation of the structure, the pull-in voltages were obtained that represent the instability characteristic of the micro-system. Meanwhile, by combining the tools of finite element method and boundary element method, the instability behavior of the MEMS relays was numerically simulated with an electronic-mechanical coupling analysis. The simulation results obtained by this hybrid computation of combining FEM and BEM are in good agreement with the experimental ones.

Citation Download Citation

Cong-Shun Wang, Weibin Zhang, Chunyang Xiong, and Jing Fang "Experiment and simulation study of instability of a novel electrostatic MEMS relay", Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); https://doi.org/10.1117/12.468762

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available