Heterodyne moire interferometry in micrometrology

Yuwen Qin; Chunxia Yan; Xinhua Ji; Guangping Guo

doi:10.1117/12.468843

29 May 2002 Heterodyne moire interferometry in micrometrology

Yuwen Qin, Chunxia Yan, Xinhua Ji, Guangping Guo

Proceedings Volume 4537, Third International Conference on Experimental Mechanics; (2002) https://doi.org/10.1117/12.468843
Event: Third International Conference on Experimental Mechanics, 2002, Beijing, China

Abstract

By modifying the hardware of a heterodyne moire interferometer (HMI) the measurement range, accuracy and efficiency of the new system can be improved significantly. With this new system, whole-field measurement of displacements and strains can be achieved by translating the photodetectors. Test results have demonstrated that this new HMI system is potentially a good alternative tool for micro-metrology.

Citation Download Citation

Yuwen Qin, Chunxia Yan, Xinhua Ji, and Guangping Guo "Heterodyne moire interferometry in micrometrology", Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); https://doi.org/10.1117/12.468843

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