Paper
29 May 2002 Several applications of nano-moire method on mesomechanics
Yongming Xing, Min Ya, Fulong Dai, Wei Yang
Author Affiliations +
Proceedings Volume 4537, Third International Conference on Experimental Mechanics; (2002) https://doi.org/10.1117/12.468856
Event: Third International Conference on Experimental Mechanics, 2002, Beijing, China
Abstract
Nano-moire method is a technique based on the conventional moire method but using crystal lattice as grating. It has nanometer- order resolution. This paper introduces some applications of this novel technique on measuring crack tip deformation in silicon single crystal, the residual strain near an interface in GaAs/Si and deformation field near an edge dislocation.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongming Xing, Min Ya, Fulong Dai, and Wei Yang "Several applications of nano-moire method on mesomechanics", Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); https://doi.org/10.1117/12.468856
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KEYWORDS
Interfaces

Silicon

Gallium arsenide

Moire patterns

Crystals

Fringe analysis

Manufacturing

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