Optomechanical variations and control in a MOEMS switch model

Thomas E. Plowman; Robert A. Stoll; David A. Winick; Arthur S. Morris III

doi:10.1117/12.443093

2 October 2001 Optomechanical variations and control in a MOEMS switch model

Thomas E. Plowman, Robert A. Stoll, David A. Winick, Arthur S. Morris III

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443093
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

This work demonstrates how optomechanical alignment inaccuracies affect the operation of a small port-count, fiber coupled, MOEMS switch using six degrees of freedom, parameterized behavioral models. Simulation results show that a control system is essential to stabilize the switch when it is subjected to the variations that would otherwise degrade its performance.

Citation Download Citation

Thomas E. Plowman, Robert A. Stoll, David A. Winick, and Arthur S. Morris III "Optomechanical variations and control in a MOEMS switch model", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443093

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