Delta3: design and control of a flexure hinge mechanism

Jean-Philippe Bacher; Stefano Bottinelli; Jean-Marc Breguet; Reymond Clavel

doi:10.1117/12.444120

8 October 2001 Delta³: design and control of a flexure hinge mechanism

Jean-Philippe Bacher, Stefano Bottinelli, Jean-Marc Breguet, Reymond Clavel

Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444120
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

In the fields of micro positioning, micromanipulation and micro machining, the required motion precision is continuously increasing. The demand also increases for high dynamic performances (large bandwidth, high closed loop stiffness.). In many cases an inappropriate mechanical structure prevents to achieve these objectives. For example backlash or friction have to be reduced as much as possible. In this paper, we propose backlash-free and friction-free manipulators using flexure hinges and direct drive actuators. A three degrees of freedom (dof) parallel robot (X, Y, Z) that is a transposition in a flexible structure of the Delta robot kinematics is presented. We focus on the design and control of the robot. A simple dynamic model is proposed and compared with measurements. The system is characterized and we propose solutions to improve performances. These solutions are tested on a linear stage.

Citation Download Citation

Jean-Philippe Bacher, Stefano Bottinelli, Jean-Marc Breguet, and Reymond Clavel "Delta³: design and control of a flexure hinge mechanism", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); https://doi.org/10.1117/12.444120

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