Scaling relationship between laser ablation rates and polymer descriptors for polymers used in microfluidics

Livia Tonge; Jinan Cao; Duy K. Pham; Jonathan P. Wright; Erol C. Harvey; Dan V. Nicolau

doi:10.1117/12.454602

19 November 2001 Scaling relationship between laser ablation rates and polymer descriptors for polymers used in microfluidics

Livia Tonge, Jinan Cao, Duy K. Pham, Jonathan P. Wright, Erol C. Harvey, Dan V. Nicolau

Author Affiliations +

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454602
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Ablation rate of polymers in laser ablation-based microfabrication depends on both laser parameters and polymer characteristics. This study aims to establish a scaling relationship linking the ablation rate and the properties of polymers commonly used in microfluidics. Ablation rate of polymers was determined experimentally using 193nm, 248nm and 308nm radiations. Polymer descriptors included thermal and surface properties. Statistical analysis was carried out for laser fluence against various polymer descriptors and/or their combinations. Analysis results show a relatively high correlation coefficient of 0.82 for the polymer ablation data when we compare fluence against the product of ablation rate and the difference between glass transition temperature and room temperature.

Citation Download Citation

Livia Tonge, Jinan Cao, Duy K. Pham, Jonathan P. Wright, Erol C. Harvey, and Dan V. Nicolau "Scaling relationship between laser ablation rates and polymer descriptors for polymers used in microfluidics", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454602

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available