Integrated circuit for SAW and MEMS sensors

Wolf-Joachim Fischer; Peter Koenig; Matthias Ploetner; Rudiger Hermann; Helmut Stab

doi:10.1117/12.449163

21 November 2001 Integrated circuit for SAW and MEMS sensors

Wolf-Joachim Fischer, Peter Koenig, Matthias Ploetner, Rudiger Hermann, Helmut Stab

Proceedings Volume 4591, Electronics and Structures for MEMS II; (2001) https://doi.org/10.1117/12.449163
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

The sensor processor circuit has been developed for hand-held devices used in industrial and environmental applications, such as on-line process monitoring. Thereby devices with SAW sensors or MEMS resonators will benefit from this processor especially. Up to 8 sensors can be connected to the circuit as multisensors or sensor arrays. Two sensor processors SP1 and SP2 for different applications are presented in this paper. The SP-1 chip has a PCMCIA interface which can be used for the program and data transfer. SAW sensors which are working in the frequency range from 80 MHz to 160 MHz can be connected to the processor directly. It is possible to use the new SP-2 chip fabricated in a 0.5(mu) CMOS process for SAW devices with a maximum frequency of 600 MHz. An on-chip analog-digital-converter (ADC) and 6 PWM modules support the development of high-miniaturized intelligent sensor systems We have developed a multi-SAW sensor system with this ASIC that manages the requirements on control as well as signal generation and storage and provides an interface to the PC and electronic devices on the board. Its low power consumption and its PCMCIA plug fulfil the requirements of small size and mobility. For this application sensors have been developed to detect hazardous gases in ambient air. Sensors with differently modified copper-phthalocyanine films are capable of detecting NO₂ and O₃, whereas those with a hyperbranched polyester film respond to NH₃.

Citation Download Citation

Wolf-Joachim Fischer, Peter Koenig, Matthias Ploetner, Rudiger Hermann, and Helmut Stab "Integrated circuit for SAW and MEMS sensors", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449163

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