Design and simulation of a novel micromachined vibratory gyroscope with enhanced-sensitivity performance

Rongming Lin; Zhe Wang; Kow Wah Leow; Mong Kim Lim; Uppili Sridhar; Yu Bo Miao; Hanhua Feng

doi:10.1117/12.448838

19 November 2001 Design and simulation of a novel micromachined vibratory gyroscope with enhanced-sensitivity performance

Rongming Lin, Zhe Wang, Kow Wah Leow, Mong Kim Lim, Uppili Sridhar, Yu Bo Miao, Hanhua Feng

Author Affiliations +

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448838
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

In this paper, the vibration characteristics of 2-DOF mechanical vibration absorber system are adopted to improve the mechanical sensitivity of a micro-electro-mechanical (MEMS) vibratory gyroscope sensor. The proposed gyroscope is basically composed of two oscillating masses that are interconnected with flexures. It can be shown that, at their resonance, the secondary mass will absorb most of vibration energy from the primary mass, thus resulting in the vibration amplification that is directly related to the mass ratio between the masses. Therefore, when an angular velocity is applied to such a gyroscope, most of the energy gained due to Coriolis force is transmitted from the primary element to the secondary element. As the primary mass is normally designed to be much bigger than the secondary mass, the Coriolis displacement of the secondary element will be amplified depending on the mass ratio. With the use of the secondary oscillating mass as a capacitive sensing element, the mechanical sensitivity of the gyroscope can be increased significantly. Modelling and simulation of a practical gyroscope design were conducted using ANSYS54 finite element code. The results are presented and verified with the theory.

Citation Download Citation

Rongming Lin, Zhe Wang, Kow Wah Leow, Mong Kim Lim, Uppili Sridhar, Yu Bo Miao, and Hanhua Feng "Design and simulation of a novel micromachined vibratory gyroscope with enhanced-sensitivity performance", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448838

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