Switching property of sol-gel vanadium oxide thin films

Ningyi Yuan; Jinhua Li; Chenglu Lin

doi:10.1117/12.447351

30 October 2001 Switching property of sol-gel vanadium oxide thin films

Ningyi Yuan, Jinhua Li, Chenglu Lin

Proceedings Volume 4596, Advanced Photonic Sensors and Applications II; (2001) https://doi.org/10.1117/12.447351
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

Highly orientated V2O5 thin film was prepared by sol-gel method on SiO₂/Si substrate. When baked at temperature higher than 400°C and pressure lower than 2Pa, the V₂O₅ thin film can be converted to VO₂ thin film. Annealing V₂O₅ thin film under 1-2Pa, 480°C for 20 minutes, the VO₂ polycrystalline thin film with resistance change larger than 3 orders of magnitude and 6.2°C hysteresis width was obtained. Meanwhile the transition progress from V₂O₅ to VO₂ was discussed in detail. It was observed that the valence of V was reduced by the sequence as V₂O₅ to V₃O₇ to V₄O₉ to V₆O₁₃ to VO₂, namely from V_nO_2n+1(n=2,3,4,6) to VO₂. It was confirmed that the key factors to obtain VO₂ thin film with good switching property were the conditions of pre-heating and vacuum baking for V₂O₅ thin film.

Citation Download Citation

Ningyi Yuan, Jinhua Li, and Chenglu Lin "Switching property of sol-gel vanadium oxide thin films", Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); https://doi.org/10.1117/12.447351

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