Chemical modification of surfaces utilizing noncovalent interactions

Mu-San Chen; Walter J. Dressick; Terence L. Schull; Susan L. Brandow

doi:10.1117/12.437739

24 July 2002 Chemical modification of surfaces utilizing noncovalent interactions

Mu-San Chen, Walter J. Dressick, Terence L. Schull, Susan L. Brandow

Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.437739
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States

Abstract

A critical requirement for using thin polymer films in many microelectronics applications is the ability to selectively immobilize materials on patterned polymer templates.1 Adaptation of standard covalent solution phase chemistries is the most direct approach, but suffers several drawbacks, including the following: (1) reduced reaction rates or yields due to surface steric effects, (2) distortion or dissolution of surface templates due to reagent/polymer incompatibilities, and (3) environmental and cost concerns arising from the use of nonaqueous solvents.

Citation Download Citation

Mu-San Chen, Walter J. Dressick, Terence L. Schull, and Susan L. Brandow "Chemical modification of surfaces utilizing noncovalent interactions", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.437739

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