Paper
24 July 2002 The critical role of metrology in nanotechnology
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Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.437273
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States
Abstract
The nascent nanotechnology revolution promises many benefits to humankind. An exciting and sometimes bewildering variety of new nanofabrication technologies and nanodevices based on electrical, optical, magnetic, mechanical, chemical and biological effects are reported almost daily. It is prudent to ask, however, how many of these breakthroughs will remain laboratory curiosities and how many will proceed to widespread industrialization. We argue that a metrology infrastructure has underpinned all industrial revolutions, and that this infrastructure is weak or nonexistent for many of the proposed nanosystems. More attention needs to be paid to metrology or progress will be derailed in a number of areas.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark L. Schattenburg and Henry I. Smith "The critical role of metrology in nanotechnology", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.437273
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KEYWORDS
Metrology

Nanotechnology

Manufacturing

Lithography

Interferometers

Computer programming

Critical dimension metrology

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