Processing techniques for novel BARC chemistries

Nickolas L. Brakensiek; Chris Cox; Rama Puligadda

doi:10.1117/12.474180

24 July 2002 Processing techniques for novel BARC chemistries

Nickolas L. Brakensiek, Chris Cox, Rama Puligadda

Proceedings Volume 4690, Advances in Resist Technology and Processing XIX; (2002) https://doi.org/10.1117/12.474180
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

Previous generations of Bottom Anti-Reflective Coatings (BARCs) have had excellent optical properties but the etch performance for these BARC's were only 30% faster than the photoresist at best. A novel BARC chemistry has increased the capability of the photolithography process; this new chemistry has the capability to change etch and optical properties by the BARC bake process. This paper will present the bake process changes required to modify both etch characteristics and optical properties. Etch characteristics that were measured were bulk etch rate and etch selectivity to photoresist. Index of refraction and the absorption coefficients were measured for optical properties. Photolithography results focusing on Acetal and Hybrid photoresist types will be presented with specific attention to critical dimension control and focus latitude shifts, if any, associated with these BARC bake process changes.

Citation Download Citation

Nickolas L. Brakensiek, Chris Cox, and Rama Puligadda "Processing techniques for novel BARC chemistries", Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); https://doi.org/10.1117/12.474180

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available