Next-generation mask metrology tool

Gerhard Schlueter; Klaus-Dieter Roeth; Carola Blaesing-Bangert; Michael Ferber

doi:10.1117/12.476920

1 August 2002 Next-generation mask metrology tool

Gerhard Schlueter, Klaus-Dieter Roeth, Carola Blaesing-Bangert, Michael Ferber

Proceedings Volume 4754, Photomask and Next-Generation Lithography Mask Technology IX; (2002) https://doi.org/10.1117/12.476920
Event: Photomask and Next Generation Lithography Mask Technology IX, 2002, Yokohama, Japan

Abstract

For next generation photo mask lithography the tolerance range for pattern placement and critical dimensions (CD) is further shrinking. Improved optical resolution and precision of a metrology system are required to qualify the lithography tool and monitor the photo mask process. Edge detection methods in transmitted light mode for pattern placement and CD measurements are advantageous if the tightened resolution and precision requirements can be met. The new LMS IPRO2 using an illumination wavelength range of 360 to 410 nm has a significantly enhanced resolution for registration and CD measurements in both, transmitted and reflected light. A new laser interferometer with an enhanced resolution of 0.3 nm contributes to the overall improved system performance. The stage is designed to measure on quartz substrates and next generation lithography (NGL) reticles up to 230 mm square in transmitted light as well as in reflected light on 200 mm and 300 mm wafers for stepper qualification.

Citation Download Citation

Gerhard Schlueter, Klaus-Dieter Roeth, Carola Blaesing-Bangert, and Michael Ferber "Next-generation mask metrology tool", Proc. SPIE 4754, Photomask and Next-Generation Lithography Mask Technology IX, (1 August 2002); https://doi.org/10.1117/12.476920

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available