Characteristics of a torsional resonator with two degrees of freedom fabricated by UV-LIGA

Takashi Usuda; Skandar Basrour; H. Majjad; Jean-Rene Coudevylle; Michel de Labachelerie

doi:10.1117/12.462860

19 April 2002 Characteristics of a torsional resonator with two degrees of freedom fabricated by UV-LIGA

Takashi Usuda, Skandar Basrour, H. Majjad, Jean-Rene Coudevylle, Michel de Labachelerie

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462860
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

One of the authors has proposed an electrostatically driven torsional resonator with two degrees of freedom (TDF). The main characteristic of the TDF resonator, in which the electrode gap does not directly affect to inconsistencies between low voltage driving and a large range of motion, is reported. The TDF structure is also beneficial for achieving high Q values. However, size reduction was difficult because of the limitations of the fabrication process. In this study, the TDF resonator is miniaturized by the UV-LIGA (UV exposed lithography and electroplated structure) process. The process and the frequency characteristics of the resonator are reported.

Citation Download Citation

Takashi Usuda, Skandar Basrour, H. Majjad, Jean-Rene Coudevylle, and Michel de Labachelerie "Characteristics of a torsional resonator with two degrees of freedom fabricated by UV-LIGA", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462860

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