New approach for 3D capacitance extractions for complex structures with conformal dielectrics

Andrey Ushakov; Irina Landman; Igor Balk

doi:10.1117/12.462829

19 April 2002 New approach for 3D capacitance extractions for complex structures with conformal dielectrics

Andrey Ushakov, Irina Landman, Igor Balk

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462829
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

This paper describes a new approach for 3-D capacitance extraction using the boundary element method. The new formulation described in this paper improves condition number of the linear system to be solved and reduces the number of unknowns in the system. Implementation of the described method, in conjunction with an acceleration algorithm, will significantly reduce the computational time and memory required for the simulation of electrostatically actuated MEMS devices.

Citation Download Citation

Andrey Ushakov, Irina Landman, and Igor Balk "New approach for 3D capacitance extractions for complex structures with conformal dielectrics", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462829

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