Optical interferometric detection of a mechanical-silicon oscillator

Kaisa Nera; Ossi Hahtela; Sami Franssila; Ilkka Tittonen

doi:10.1117/12.462841

19 April 2002 Optical interferometric detection of a mechanical silicon oscillator

Kaisa Nera, Ossi Hahtela, Sami Franssila, Ilkka Tittonen

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462841
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Mechanical oscillators that have a stable resonance with high quality factor have applications as reference oscillators, sensors and in even very sophisticated high- precision experiments for observing quantum effects. In order to obtain a high quality factor the mechanical energy dissipation has to be minimised. At atmospheric pressure the most significant loss mechanism is gas damping, but for an oscillator working in vacuum the major part of the mechanical energy losses is caused by the coupling to the support structure and by internal friction which in turn is a result of a variety of physical mechanisms like thermoelastic effects and phonon scattering. Thus a great attention should to be paid to the material choice and the oscillator design.

Citation Download Citation

Kaisa Nera, Ossi Hahtela, Sami Franssila, and Ilkka Tittonen "Optical interferometric detection of a mechanical silicon oscillator", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462841

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