Paper
13 September 2002 Microscopic characterization of ablation craters produced by femtosecond laser pulses
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Abstract
The formation of well-defined craters is a general feature of laser ablation with ultrashort laser pulses, indicative of a sharp ablation threshold. Results of a microscopic characterization of ablation craters on semiconductors after irradiation with single intense ultrashort laser pulses are presented.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vassili Temnov, Klaus Sokolowski-Tinten, Nikola Stojanovic, Sergei I. Kudryashov, Dietrich von der Linde, Boris Kogan, Andreas Schlarb, Bastian Weyers, Rolf Moeller, Joerg Seekamp, and Clivia Sotomayor-Torres "Microscopic characterization of ablation craters produced by femtosecond laser pulses", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482062
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Cited by 5 scholarly publications.
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KEYWORDS
Laser ablation

Scanning electron microscopy

Gallium arsenide

Femtosecond phenomena

Atomic force microscopy

Silicon

Laser damage threshold

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