Dual-frequency laser interferometry of rotating angle measurement with a grating wedge-plate

Wei Tao; Zhaobang Pu; Zhuo Zhang

doi:10.1117/12.473556

19 June 2002 Dual-frequency laser interferometry of rotating angle measurement with a grating wedge-plate

Wei Tao, Zhaobang Pu, Zhuo Zhang

Proceedings Volume 4778, Interferometry XI: Applications; (2002) https://doi.org/10.1117/12.473556
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

A new method of rotating angle measurement with dual-frequency laser interferometry using a grating wedge-plate is described here. A grating wedge-plate is formed by making a reflecting flare grating on a glass wedge-plate. The principle of the grating wedge-plate is introduced and its application in the rotating angle measurement system is provided. The setup and principle of the system are also introduced. This system can be applied not only to small angle measurement but also to dynamic random angle measurement. An experiment of rotating angle measurement is given. The measuring range of angle is up to 360 degree(s) and the measurement accuracy is better than 0.5 arc sec. High precision, stability and immune to errors are the distinguished features of this interferometer.

Citation Download Citation

Wei Tao, Zhaobang Pu, and Zhuo Zhang "Dual-frequency laser interferometry of rotating angle measurement with a grating wedge-plate", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473556

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