Effects of hydrogen diffusion and UV irradiation in Pd thin films

M. Di Giulio; M. Dinescu; E. Filippo; Vincenzo Nassisi; Daniela Manno; A. Lo Russo

doi:10.1117/12.530781

19 November 2003 Effects of hydrogen diffusion and UV irradiation in Pd thin films

M. Di Giulio, M. Dinescu, E. Filippo, Vincenzo Nassisi, Daniela Manno, A. Lo Russo

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.530781
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

Experimental results concerning the morphologic modification and the presence of new elements in palladium films loaded in hydrogen gas and processed by an excimer laser are presented. The Pd films were deposited on Si(100) wafers and imbedded in hydrogen up to 50 days. Before to be analyzed the films were irradiated with 500 laser shots. The laser fluence was lower than 25 mJ/cm² in order to avoid the film ablation. The gas pressure was 5 bar. The samples were analyzed by Scanning Electron Microscopy (SEM) and Energy Dispersive X-Ray Spectroscopy (EDX). The films changed their morphology after about eight days whereas grains with new elements were found in samples processed more than thirty days.

Citation Download Citation

M. Di Giulio, M. Dinescu, E. Filippo, Vincenzo Nassisi, Daniela Manno, and A. Lo Russo "Effects of hydrogen diffusion and UV irradiation in Pd thin films", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.530781

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