New optical correlation techniques for characterizing rough surfaces

Oleg V. Angelsky; Peter P. Maksimyak

doi:10.1117/12.527047

19 November 2003 New optical correlation techniques for characterizing rough surfaces

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.527047
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimation of these parameters is proposed.

Citation Download Citation

Oleg V. Angelsky and Peter P. Maksimyak "New optical correlation techniques for characterizing rough surfaces", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.527047

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